New Nitrogen Purging Technology in Semiconductor Fabrication Can Accrue Millions in Energy Savings
December 3, 2024 CO2 emissions associated with electricity generation will also decrease and reduce the Fab’s carbon footprint. Research conducted by Festo finds a new generation of its low-energy flow-control valves utilized by Front Opening Unified Pods (FOUPs) purge systems can reduce Nitrogen gas (N2) consumption by as much as 75%. A new Festo white…